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Evaluation and metrological performance of a novel ionisation vacuum gauge suitable as reference standard
•A new type of ionisation vacuum gauge shows excellent stability and linearity.•Relative gas sensitivity factors can be predicted.•The new new type of ionisation vacuum gauge can serve as reference standard from 1E to 6 Pa to 1E-2 Pa. Recently, a new type of ionization vacuum gauge was introduced, w...
| Autores principales: | , , , , , , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2023
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1016/j.measurement.2023.112552 http://cds.cern.ch/record/2856557 |