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Laser-based Micro- and Nanoprocessing XVI
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
SPIE
2022
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2857758 |
| _version_ | 1780977582883209216 |
|---|---|
| author | Watanabe, Akira Kling, Rainer |
| author_facet | Watanabe, Akira Kling, Rainer |
| author_sort | Watanabe, Akira |
| collection | CERN |
| id | cern-2857758 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2022 |
| publisher | SPIE |
| record_format | invenio |
| spelling | cern-28577582023-05-05T15:33:30Zhttp://cds.cern.ch/record/2857758engWatanabe, AkiraKling, RainerLaser-based Micro- and Nanoprocessing XVIEngineeringSPIEoai:cds.cern.ch:28577582022 |
| spellingShingle | Engineering Watanabe, Akira Kling, Rainer Laser-based Micro- and Nanoprocessing XVI |
| title | Laser-based Micro- and Nanoprocessing XVI |
| title_full | Laser-based Micro- and Nanoprocessing XVI |
| title_fullStr | Laser-based Micro- and Nanoprocessing XVI |
| title_full_unstemmed | Laser-based Micro- and Nanoprocessing XVI |
| title_short | Laser-based Micro- and Nanoprocessing XVI |
| title_sort | laser-based micro- and nanoprocessing xvi |
| topic | Engineering |
| url | http://cds.cern.ch/record/2857758 |
| work_keys_str_mv | AT watanabeakira laserbasedmicroandnanoprocessingxvi AT klingrainer laserbasedmicroandnanoprocessingxvi |