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Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology

A series of monolithic active pixel sensor prototypes (APTS chips) were manufactured in the TPSCo 65 nm CMOS imaging process in the framework of the CERN-EP R&D; on monolithic sensors and the ALICE ITS3 upgrade project. Each APTS chip contains a 4 × 4 pixel matrix with fast analog outputs buffer...

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Autores principales: Deng, W, Aglieri Rinella, G, Aresti, M, Baudot, J, Benotto, F, Beole, S, Bialas, W, Borghello, G, Bugiel, S, Campbell, M, Carnesecchi, F, Charbon, E, Cecconi, L, Colledani, C, de Melo, J L A, Dorda Martin, A, Dorokhov, A, Ferrero, C, Hasenbichler, J, Hong, G H, Hu, C, Huang, G, Kluge, A, Kugathasan, T, La Rocca, P, Mager, M, Marras, D, Martinengo, P, Munker, M, Perciballi, S, Piro, F, Prino, F, Rebane, K, Reidt, F, Sanna, I, Sarritzu, V, Savino, U, Snoeys, W, Suljic, M, Termo, G, Triffiro, A, Turcato, A, Usai, G, Wu, Y
Lenguaje:eng
Publicado: 2023
Materias:
Acceso en línea:https://dx.doi.org/10.1088/1748-0221/18/01/C01065
http://cds.cern.ch/record/2861834
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author Deng, W
Aglieri Rinella, G
Aresti, M
Baudot, J
Benotto, F
Beole, S
Bialas, W
Borghello, G
Bugiel, S
Campbell, M
Carnesecchi, F
Charbon, E
Cecconi, L
Colledani, C
de Melo, J L A
Dorda Martin, A
Dorokhov, A
Ferrero, C
Hasenbichler, J
Hong, G H
Hu, C
Huang, G
Kluge, A
Kugathasan, T
La Rocca, P
Mager, M
Marras, D
Martinengo, P
Munker, M
Perciballi, S
Piro, F
Prino, F
Rebane, K
Reidt, F
Sanna, I
Sarritzu, V
Savino, U
Snoeys, W
Suljic, M
Termo, G
Triffiro, A
Turcato, A
Usai, G
Wu, Y
author_facet Deng, W
Aglieri Rinella, G
Aresti, M
Baudot, J
Benotto, F
Beole, S
Bialas, W
Borghello, G
Bugiel, S
Campbell, M
Carnesecchi, F
Charbon, E
Cecconi, L
Colledani, C
de Melo, J L A
Dorda Martin, A
Dorokhov, A
Ferrero, C
Hasenbichler, J
Hong, G H
Hu, C
Huang, G
Kluge, A
Kugathasan, T
La Rocca, P
Mager, M
Marras, D
Martinengo, P
Munker, M
Perciballi, S
Piro, F
Prino, F
Rebane, K
Reidt, F
Sanna, I
Sarritzu, V
Savino, U
Snoeys, W
Suljic, M
Termo, G
Triffiro, A
Turcato, A
Usai, G
Wu, Y
author_sort Deng, W
collection CERN
description A series of monolithic active pixel sensor prototypes (APTS chips) were manufactured in the TPSCo 65 nm CMOS imaging process in the framework of the CERN-EP R&D; on monolithic sensors and the ALICE ITS3 upgrade project. Each APTS chip contains a 4 × 4 pixel matrix with fast analog outputs buffered to individual pads. To explore the process and sensor characteristics, various pixel pitches (10 µm–25 µm), geometries and reverse biasing schemes were included. Prototypes are fully functional with detailed sensor characterization ongoing. The design will be presented with some experimental results also correlating to some transistor measurements.
id cern-2861834
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2023
record_format invenio
spelling cern-28618342023-06-14T18:27:09Zdoi:10.1088/1748-0221/18/01/C01065http://cds.cern.ch/record/2861834engDeng, WAglieri Rinella, GAresti, MBaudot, JBenotto, FBeole, SBialas, WBorghello, GBugiel, SCampbell, MCarnesecchi, FCharbon, ECecconi, LColledani, Cde Melo, J L ADorda Martin, ADorokhov, AFerrero, CHasenbichler, JHong, G HHu, CHuang, GKluge, AKugathasan, TLa Rocca, PMager, MMarras, DMartinengo, PMunker, MPerciballi, SPiro, FPrino, FRebane, KReidt, FSanna, ISarritzu, VSavino, USnoeys, WSuljic, MTermo, GTriffiro, ATurcato, AUsai, GWu, YDesign of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technologyDetectors and Experimental TechniquesA series of monolithic active pixel sensor prototypes (APTS chips) were manufactured in the TPSCo 65 nm CMOS imaging process in the framework of the CERN-EP R&D; on monolithic sensors and the ALICE ITS3 upgrade project. Each APTS chip contains a 4 × 4 pixel matrix with fast analog outputs buffered to individual pads. To explore the process and sensor characteristics, various pixel pitches (10 µm–25 µm), geometries and reverse biasing schemes were included. Prototypes are fully functional with detailed sensor characterization ongoing. The design will be presented with some experimental results also correlating to some transistor measurements.oai:cds.cern.ch:28618342023
spellingShingle Detectors and Experimental Techniques
Deng, W
Aglieri Rinella, G
Aresti, M
Baudot, J
Benotto, F
Beole, S
Bialas, W
Borghello, G
Bugiel, S
Campbell, M
Carnesecchi, F
Charbon, E
Cecconi, L
Colledani, C
de Melo, J L A
Dorda Martin, A
Dorokhov, A
Ferrero, C
Hasenbichler, J
Hong, G H
Hu, C
Huang, G
Kluge, A
Kugathasan, T
La Rocca, P
Mager, M
Marras, D
Martinengo, P
Munker, M
Perciballi, S
Piro, F
Prino, F
Rebane, K
Reidt, F
Sanna, I
Sarritzu, V
Savino, U
Snoeys, W
Suljic, M
Termo, G
Triffiro, A
Turcato, A
Usai, G
Wu, Y
Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology
title Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology
title_full Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology
title_fullStr Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology
title_full_unstemmed Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology
title_short Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology
title_sort design of an analog monolithic pixel sensor prototype in tpsco 65 nm cmos imaging technology
topic Detectors and Experimental Techniques
url https://dx.doi.org/10.1088/1748-0221/18/01/C01065
http://cds.cern.ch/record/2861834
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