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A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
Autor principal: | |
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Lenguaje: | eng |
Publicado: |
1984
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Acceso en línea: | http://cds.cern.ch/record/286662 |
_version_ | 1780888338029346816 |
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author | Zysin, Ya |
author_facet | Zysin, Ya |
author_sort | Zysin, Ya |
collection | CERN |
id | cern-286662 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1984 |
record_format | invenio |
spelling | cern-2866622019-09-30T06:29:59Zhttp://cds.cern.ch/record/286662engZysin, YaA metastable phase of ion-implanted antimony in silicon created by incoherent-light annealingOther Fields of Physicsoai:cds.cern.ch:2866621984 |
spellingShingle | Other Fields of Physics Zysin, Ya A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing |
title | A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing |
title_full | A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing |
title_fullStr | A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing |
title_full_unstemmed | A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing |
title_short | A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing |
title_sort | metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing |
topic | Other Fields of Physics |
url | http://cds.cern.ch/record/286662 |
work_keys_str_mv | AT zysinya ametastablephaseofionimplantedantimonyinsiliconcreatedbyincoherentlightannealing AT zysinya metastablephaseofionimplantedantimonyinsiliconcreatedbyincoherentlightannealing |