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A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing

Detalles Bibliográficos
Autor principal: Zysin, Ya
Lenguaje:eng
Publicado: 1984
Materias:
Acceso en línea:http://cds.cern.ch/record/286662
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author Zysin, Ya
author_facet Zysin, Ya
author_sort Zysin, Ya
collection CERN
id cern-286662
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1984
record_format invenio
spelling cern-2866622019-09-30T06:29:59Zhttp://cds.cern.ch/record/286662engZysin, YaA metastable phase of ion-implanted antimony in silicon created by incoherent-light annealingOther Fields of Physicsoai:cds.cern.ch:2866621984
spellingShingle Other Fields of Physics
Zysin, Ya
A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
title A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
title_full A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
title_fullStr A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
title_full_unstemmed A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
title_short A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
title_sort metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing
topic Other Fields of Physics
url http://cds.cern.ch/record/286662
work_keys_str_mv AT zysinya ametastablephaseofionimplantedantimonyinsiliconcreatedbyincoherentlightannealing
AT zysinya metastablephaseofionimplantedantimonyinsiliconcreatedbyincoherentlightannealing