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A metastable phase of ion-implanted antimony in silicon created by incoherent-light annealing

Detalles Bibliográficos
Autor principal:	Zysin, Ya
Lenguaje:	eng
Publicado:	1984
Materias:	Other Fields of Physics
Acceso en línea:	http://cds.cern.ch/record/286662

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