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Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
1990
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/286695 |
| _version_ | 1780888344746524672 |
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| author | Kyllesbech-Larsen, K Nylandsted-Larsen, A |
| author_facet | Kyllesbech-Larsen, K Nylandsted-Larsen, A |
| author_sort | Kyllesbech-Larsen, K |
| collection | CERN |
| id | cern-286695 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1990 |
| record_format | invenio |
| spelling | cern-2866952019-09-30T06:29:59Zhttp://cds.cern.ch/record/286695engKyllesbech-Larsen, KNylandsted-Larsen, ADiffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical resultsOther Fields of Physicsoai:cds.cern.ch:2866951990 |
| spellingShingle | Other Fields of Physics Kyllesbech-Larsen, K Nylandsted-Larsen, A Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results |
| title | Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results |
| title_full | Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results |
| title_fullStr | Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results |
| title_full_unstemmed | Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results |
| title_short | Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results |
| title_sort | diffusion of groups iv and v impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/286695 |
| work_keys_str_mv | AT kyllesbechlarsenk diffusionofgroupsivandvimpuritiesinsiliconathighdonorconcentrationsacomparisonbetweenexperimentalandtheoreticalresults AT nylandstedlarsena diffusionofgroupsivandvimpuritiesinsiliconathighdonorconcentrationsacomparisonbetweenexperimentalandtheoreticalresults |