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Diffusion of groups IV and V impurities in silicon at high donor concentrations: a comparison between experimental and theoretical results

Detalles Bibliográficos
Autores principales:	Kyllesbech-Larsen, K, Nylandsted-Larsen, A
Lenguaje:	eng
Publicado:	1990
Materias:	Other Fields of Physics
Acceso en línea:	http://cds.cern.ch/record/286695

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