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Multicusp sources for ion beam lithography applications
| Autores principales: | , , , , , , , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
1995
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/289020 |
| _version_ | 1780888484688429056 |
|---|---|
| author | Leung, K N Herz, P Kunkel, W B Lee, Y Perkins, L Pickard, D S Sarstedt, M Weber, M Williams, M D |
| author_facet | Leung, K N Herz, P Kunkel, W B Lee, Y Perkins, L Pickard, D S Sarstedt, M Weber, M Williams, M D |
| author_sort | Leung, K N |
| collection | CERN |
| id | cern-289020 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1995 |
| record_format | invenio |
| spelling | cern-2890202019-09-30T06:29:59Zhttp://cds.cern.ch/record/289020engLeung, K NHerz, PKunkel, W BLee, YPerkins, LPickard, D SSarstedt, MWeber, MWilliams, M DMulticusp sources for ion beam lithography applicationsAccelerators and Storage RingsLBL-36645oai:cds.cern.ch:2890201995 |
| spellingShingle | Accelerators and Storage Rings Leung, K N Herz, P Kunkel, W B Lee, Y Perkins, L Pickard, D S Sarstedt, M Weber, M Williams, M D Multicusp sources for ion beam lithography applications |
| title | Multicusp sources for ion beam lithography applications |
| title_full | Multicusp sources for ion beam lithography applications |
| title_fullStr | Multicusp sources for ion beam lithography applications |
| title_full_unstemmed | Multicusp sources for ion beam lithography applications |
| title_short | Multicusp sources for ion beam lithography applications |
| title_sort | multicusp sources for ion beam lithography applications |
| topic | Accelerators and Storage Rings |
| url | http://cds.cern.ch/record/289020 |
| work_keys_str_mv | AT leungkn multicuspsourcesforionbeamlithographyapplications AT herzp multicuspsourcesforionbeamlithographyapplications AT kunkelwb multicuspsourcesforionbeamlithographyapplications AT leey multicuspsourcesforionbeamlithographyapplications AT perkinsl multicuspsourcesforionbeamlithographyapplications AT pickardds multicuspsourcesforionbeamlithographyapplications AT sarstedtm multicuspsourcesforionbeamlithographyapplications AT weberm multicuspsourcesforionbeamlithographyapplications AT williamsmd multicuspsourcesforionbeamlithographyapplications |