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Niobium films produced by magnetron sputtering using an Ar-He mixture as discharge gas
Superconducting RF accelerating cavities have been produced at CERN by sputter-coating, with a thin niobium layer, cavities made of copper. In the present work, the discharge behaviour and niobium film properties have been investigated when part of the argon sputtering gas is replaced with helium. H...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
1995
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/295022 |