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39th International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication
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Lenguaje: | eng |
Publicado: |
1995
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Acceso en línea: | http://cds.cern.ch/record/304690 |
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author | Kern, Dieter L |
author_facet | Kern, Dieter L |
author_sort | Kern, Dieter L |
collection | CERN |
id | cern-304690 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1995 |
record_format | invenio |
spelling | cern-3046902021-07-30T13:24:20Zhttp://cds.cern.ch/record/304690engKern, Dieter L39th International Symposium on Electron, Ion and Photon Beam Technology and NanofabricationEngineeringoai:cds.cern.ch:3046901995 |
spellingShingle | Engineering Kern, Dieter L 39th International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication |
title | 39th International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication |
title_full | 39th International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication |
title_fullStr | 39th International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication |
title_full_unstemmed | 39th International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication |
title_short | 39th International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication |
title_sort | 39th international symposium on electron, ion and photon beam technology and nanofabrication |
topic | Engineering |
url | http://cds.cern.ch/record/304690 |
work_keys_str_mv | AT kerndieterl 39thinternationalsymposiumonelectronionandphotonbeamtechnologyandnanofabrication |