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Development of ion sources for ion projection lithography

Detalles Bibliográficos
Autores principales:	Lee, Y, Gough, R A, Kunkel, W B, Leung, K N, Perkins, L T, Pickard, D S, Sun, L Z, Vujic, J L, Williams, M D
Lenguaje:	eng
Publicado:	1996
Materias:	Accelerators and Storage Rings
Acceso en línea:	http://cds.cern.ch/record/308557

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