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High energy metal ion implantation using "Magis", a novel, broad-beam, Marx-generator-based ion source
Autores principales: | Anders, A, Brown, I G, Dickinson, M R, MacGill, R A |
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Lenguaje: | eng |
Publicado: |
1996
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/316108 |
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