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Handbook of thin film process technology
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
IOP
1995
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/318001 |
| _version_ | 1780890463540084736 |
|---|---|
| author | Shah, S Ismat Glocker, David A |
| author_facet | Shah, S Ismat Glocker, David A |
| author_sort | Shah, S Ismat |
| collection | CERN |
| id | cern-318001 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1995 |
| publisher | IOP |
| record_format | invenio |
| spelling | cern-3180012021-04-22T03:31:24Zhttp://cds.cern.ch/record/318001engShah, S IsmatGlocker, David AHandbook of thin film process technologyOther Fields of PhysicsIOPoai:cds.cern.ch:3180011995 |
| spellingShingle | Other Fields of Physics Shah, S Ismat Glocker, David A Handbook of thin film process technology |
| title | Handbook of thin film process technology |
| title_full | Handbook of thin film process technology |
| title_fullStr | Handbook of thin film process technology |
| title_full_unstemmed | Handbook of thin film process technology |
| title_short | Handbook of thin film process technology |
| title_sort | handbook of thin film process technology |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/318001 |
| work_keys_str_mv | AT shahsismat handbookofthinfilmprocesstechnology AT glockerdavida handbookofthinfilmprocesstechnology |