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Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Oxford Univ. Press
1996
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/318003 |
| _version_ | 1780890463970000896 |
|---|---|
| author | Taniguchi, Norio |
| author_facet | Taniguchi, Norio |
| author_sort | Taniguchi, Norio |
| collection | CERN |
| id | cern-318003 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1996 |
| publisher | Oxford Univ. Press |
| record_format | invenio |
| spelling | cern-3180032021-04-22T03:31:23Zhttp://cds.cern.ch/record/318003engTaniguchi, NorioNanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine ProductsEngineeringOxford Univ. Pressoai:cds.cern.ch:3180031996 |
| spellingShingle | Engineering Taniguchi, Norio Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products |
| title | Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products |
| title_full | Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products |
| title_fullStr | Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products |
| title_full_unstemmed | Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products |
| title_short | Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products |
| title_sort | nanotechnology: integrated processing systems for ultra-precision and ultra-fine products |
| topic | Engineering |
| url | http://cds.cern.ch/record/318003 |
| work_keys_str_mv | AT taniguchinorio nanotechnologyintegratedprocessingsystemsforultraprecisionandultrafineproducts |