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40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
1996
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| Acceso en línea: | http://cds.cern.ch/record/324017 |
| _version_ | 1780890844815949824 |
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| author | Pang, S W |
| author_facet | Pang, S W |
| author_sort | Pang, S W |
| collection | CERN |
| id | cern-324017 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1996 |
| record_format | invenio |
| spelling | cern-3240172021-07-30T13:23:22Z http://cds.cern.ch/record/324017 eng Pang, S W 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 Engineering 1996 |
| spellingShingle | Engineering Pang, S W 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| title | 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| title_full | 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| title_fullStr | 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| title_full_unstemmed | 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| title_short | 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| title_sort | 40th international conference on electron-, ion- and photon-beam technology and nanofabrication 1996 |
| topic | Engineering |
| url | http://cds.cern.ch/record/324017 |
| work_keys_str_mv | AT pangsw 40thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication1996 |