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Micromachining of silicon for thermal and position-sensitive nuclear detector applications

Detalles Bibliográficos
Autores principales: Bäcklund, Yu, Coron, N J, Delsing, P, Jonson, B, Lindroos, M, Nyman, G H, Ravn, H L, Riisager, K, Stroke, Hinko Henry
Lenguaje:eng
Publicado: 1989
Materias:
Acceso en línea:https://dx.doi.org/10.1016/0168-9002(89)91302-8
http://cds.cern.ch/record/328554
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author Bäcklund, Yu
Coron, N J
Delsing, P
Jonson, B
Lindroos, M
Nyman, G H
Ravn, H L
Riisager, K
Stroke, Hinko Henry
author_facet Bäcklund, Yu
Coron, N J
Delsing, P
Jonson, B
Lindroos, M
Nyman, G H
Ravn, H L
Riisager, K
Stroke, Hinko Henry
author_sort Bäcklund, Yu
collection CERN
id cern-328554
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1989
record_format invenio
spelling cern-3285542019-09-30T06:29:59Zdoi:10.1016/0168-9002(89)91302-8http://cds.cern.ch/record/328554engBäcklund, YuCoron, N JDelsing, PJonson, BLindroos, MNyman, G HRavn, H LRiisager, KStroke, Hinko HenryMicromachining of silicon for thermal and position-sensitive nuclear detector applicationsNuclear Physics - Experimentoai:cds.cern.ch:3285541989
spellingShingle Nuclear Physics - Experiment
Bäcklund, Yu
Coron, N J
Delsing, P
Jonson, B
Lindroos, M
Nyman, G H
Ravn, H L
Riisager, K
Stroke, Hinko Henry
Micromachining of silicon for thermal and position-sensitive nuclear detector applications
title Micromachining of silicon for thermal and position-sensitive nuclear detector applications
title_full Micromachining of silicon for thermal and position-sensitive nuclear detector applications
title_fullStr Micromachining of silicon for thermal and position-sensitive nuclear detector applications
title_full_unstemmed Micromachining of silicon for thermal and position-sensitive nuclear detector applications
title_short Micromachining of silicon for thermal and position-sensitive nuclear detector applications
title_sort micromachining of silicon for thermal and position-sensitive nuclear detector applications
topic Nuclear Physics - Experiment
url https://dx.doi.org/10.1016/0168-9002(89)91302-8
http://cds.cern.ch/record/328554
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