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Micromachining of silicon for thermal and position-sensitive nuclear detector applications
Autores principales: | , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
1989
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/0168-9002(89)91302-8 http://cds.cern.ch/record/328554 |
_version_ | 1780891028371275776 |
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author | Bäcklund, Yu Coron, N J Delsing, P Jonson, B Lindroos, M Nyman, G H Ravn, H L Riisager, K Stroke, Hinko Henry |
author_facet | Bäcklund, Yu Coron, N J Delsing, P Jonson, B Lindroos, M Nyman, G H Ravn, H L Riisager, K Stroke, Hinko Henry |
author_sort | Bäcklund, Yu |
collection | CERN |
id | cern-328554 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1989 |
record_format | invenio |
spelling | cern-3285542019-09-30T06:29:59Zdoi:10.1016/0168-9002(89)91302-8http://cds.cern.ch/record/328554engBäcklund, YuCoron, N JDelsing, PJonson, BLindroos, MNyman, G HRavn, H LRiisager, KStroke, Hinko HenryMicromachining of silicon for thermal and position-sensitive nuclear detector applicationsNuclear Physics - Experimentoai:cds.cern.ch:3285541989 |
spellingShingle | Nuclear Physics - Experiment Bäcklund, Yu Coron, N J Delsing, P Jonson, B Lindroos, M Nyman, G H Ravn, H L Riisager, K Stroke, Hinko Henry Micromachining of silicon for thermal and position-sensitive nuclear detector applications |
title | Micromachining of silicon for thermal and position-sensitive nuclear detector applications |
title_full | Micromachining of silicon for thermal and position-sensitive nuclear detector applications |
title_fullStr | Micromachining of silicon for thermal and position-sensitive nuclear detector applications |
title_full_unstemmed | Micromachining of silicon for thermal and position-sensitive nuclear detector applications |
title_short | Micromachining of silicon for thermal and position-sensitive nuclear detector applications |
title_sort | micromachining of silicon for thermal and position-sensitive nuclear detector applications |
topic | Nuclear Physics - Experiment |
url | https://dx.doi.org/10.1016/0168-9002(89)91302-8 http://cds.cern.ch/record/328554 |
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