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Micromachining of silicon for thermal and position-sensitive nuclear detector applications
Autores principales: | Bäcklund, Yu, Coron, N J, Delsing, P, Jonson, B, Lindroos, M, Nyman, G H, Ravn, H L, Riisager, K, Stroke, Hinko Henry |
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Lenguaje: | eng |
Publicado: |
1989
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/0168-9002(89)91302-8 http://cds.cern.ch/record/328554 |
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