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Origin of Possible Contamination Introduced by a Turbomolecular Pumping System
Turbomolecular pumping groups are widely used in accelerators for the pre-evacuation and during the bake-out of the vacuum system. A major requirement for these groups, apart from pumping speed considerations, is the cleanliness of the vacuum produced. In an attempt to clarify this question, a bakea...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
1998
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| Acceso en línea: | https://dx.doi.org/10.1016/S0042-207X(98)00385-6 http://cds.cern.ch/record/372934 |