E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics
Autores principales: | , , , |
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Lenguaje: | eng |
Publicado: |
1999
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/376781 |
_version_ | 1780893277396926464 |
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author | Lindner, Jörg K N Svensson, Bengt G Hemment, Peter F L Atwater, Harry A |
author_facet | Lindner, Jörg K N Svensson, Bengt G Hemment, Peter F L Atwater, Harry A |
author_sort | Lindner, Jörg K N |
collection | CERN |
id | cern-376781 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1999 |
record_format | invenio |
spelling | cern-3767812021-04-22T21:12:16Z http://cds.cern.ch/record/376781 eng Lindner, Jörg K N Svensson, Bengt G Hemment, Peter F L Atwater, Harry A E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics Condensed Matter 1999 |
spellingShingle | Condensed Matter Lindner, Jörg K N Svensson, Bengt G Hemment, Peter F L Atwater, Harry A E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics |
title | E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics |
title_full | E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics |
title_fullStr | E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics |
title_full_unstemmed | E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics |
title_short | E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics |
title_sort | e-mrs 1998 spring meeting symposium j on ion implantation into semiconductors, oxides and ceramics |
topic | Condensed Matter |
url | http://cds.cern.ch/record/376781 |
work_keys_str_mv | AT lindnerjorgkn emrs1998springmeetingsymposiumjonionimplantationintosemiconductorsoxidesandceramics AT svenssonbengtg emrs1998springmeetingsymposiumjonionimplantationintosemiconductorsoxidesandceramics AT hemmentpeterfl emrs1998springmeetingsymposiumjonionimplantationintosemiconductorsoxidesandceramics AT atwaterharrya emrs1998springmeetingsymposiumjonionimplantationintosemiconductorsoxidesandceramics |