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Comparison of silicon strip tracker module size using large sensors from 6 inch wafers

Two large silicon strip sensor made from 6 inch wafers are placed next to each other to simulate the size of a CMS outer silicon tracker module. On the left is a prototype 2 sensor CMS inner endcap silicon tracker module made from 4 inch wafers.

Detalles Bibliográficos
Autor principal: Honma, Alan
Publicado: 1999
Materias:
Acceso en línea:http://cds.cern.ch/record/41182