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FPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid helium
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
1998
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/430519 |
| _version_ | 1780895224678055936 |
|---|---|
| author | Haruyama, T Kimura, N Nakamoto, T |
| author_facet | Haruyama, T Kimura, N Nakamoto, T |
| author_sort | Haruyama, T |
| collection | CERN |
| id | cern-430519 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1998 |
| record_format | invenio |
| spelling | cern-4305192019-09-30T06:29:59Zhttp://cds.cern.ch/record/430519engHaruyama, TKimura, NNakamoto, TFPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid heliumEngineeringKEK-98-113oai:cds.cern.ch:4305191998 |
| spellingShingle | Engineering Haruyama, T Kimura, N Nakamoto, T FPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid helium |
| title | FPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid helium |
| title_full | FPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid helium |
| title_fullStr | FPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid helium |
| title_full_unstemmed | FPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid helium |
| title_short | FPS51B: A small piezo-resistive silicon pressure sensor for use in superfluid helium |
| title_sort | fps51b: a small piezo-resistive silicon pressure sensor for use in superfluid helium |
| topic | Engineering |
| url | http://cds.cern.ch/record/430519 |
| work_keys_str_mv | AT haruyamat fps51basmallpiezoresistivesiliconpressuresensorforuseinsuperfluidhelium AT kimuran fps51basmallpiezoresistivesiliconpressuresensorforuseinsuperfluidhelium AT nakamotot fps51basmallpiezoresistivesiliconpressuresensorforuseinsuperfluidhelium |