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Fabrication of a high-density MCM-D for a pixel detector system using a BCB/Cu technology

The MCM-D which is described here is a prototype for a pixel detector system for the planned Large Hadron Collider (LHC) at CERN, Geneva. The project is within the ATLAS experiment. The module consists of a sensor tile with an active area of 16.4 mm*60.4 mm, 16 readout chips, each serving 24*160 pix...

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Detalles Bibliográficos
Autores principales:	Topper, M, Dietrich, L, Engelmann, G, Fehlberg, S, Gerlach, P, Wolf, J, Ehrmann, O, Becks, K H, Reichl, H
Lenguaje:	eng
Publicado:	1999
Materias:	Detectors and Experimental Techniques
Acceso en línea:	http://cds.cern.ch/record/438244

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