Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers

Two metre long, cylindrical vacuum chambers of diameter ranging from 34 to 100 mm, coated with TiZrV getter films by sputtering, have been baked for about 24 h at temperatures from 120 to 250 degrees C. The ultimate pressures achieved after bakeout were found to correspond to the ratio of the pressu...

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Detalles Bibliográficos
Autores principales: Benvenuti, Cristoforo, Escudeiro-Santana, A, Ruzinov, V
Lenguaje:eng
Publicado: 1999
Materias:
Accelerators and Storage Rings
Acceso en línea:http://cds.cern.ch/record/442324
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author Benvenuti, Cristoforo
Escudeiro-Santana, A
Ruzinov, V
author_facet Benvenuti, Cristoforo
Escudeiro-Santana, A
Ruzinov, V
author_sort Benvenuti, Cristoforo
collection CERN
description Two metre long, cylindrical vacuum chambers of diameter ranging from 34 to 100 mm, coated with TiZrV getter films by sputtering, have been baked for about 24 h at temperatures from 120 to 250 degrees C. The ultimate pressures achieved after bakeout were found to correspond to the ratio of the pressure gauge degassing to the effective pumping speed provided by the chamber at the location of the gauge. The results covering a pressure range from 10/sup -11/ Torr down to 10 /sup -13/ Torr are presented and discussed. (6 refs).
id cern-442324
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1999
record_format invenio
spelling cern-4423242019-09-30T06:29:59Zhttp://cds.cern.ch/record/442324engBenvenuti, CristoforoEscudeiro-Santana, ARuzinov, VUltimate pressures achieved in TiZrV sputter-coated vacuum chambersAccelerators and Storage RingsTwo metre long, cylindrical vacuum chambers of diameter ranging from 34 to 100 mm, coated with TiZrV getter films by sputtering, have been baked for about 24 h at temperatures from 120 to 250 degrees C. The ultimate pressures achieved after bakeout were found to correspond to the ratio of the pressure gauge degassing to the effective pumping speed provided by the chamber at the location of the gauge. The results covering a pressure range from 10/sup -11/ Torr down to 10 /sup -13/ Torr are presented and discussed. (6 refs).CERN-EST-99-008-SMoai:cds.cern.ch:4423241999-12-15
spellingShingle Accelerators and Storage Rings
Benvenuti, Cristoforo
Escudeiro-Santana, A
Ruzinov, V
Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers
title Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers
title_full Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers
title_fullStr Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers
title_full_unstemmed Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers
title_short Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers
title_sort ultimate pressures achieved in tizrv sputter-coated vacuum chambers
topic Accelerators and Storage Rings
url http://cds.cern.ch/record/442324
work_keys_str_mv AT benvenuticristoforo ultimatepressuresachievedintizrvsputtercoatedvacuumchambers
AT escudeirosantanaa ultimatepressuresachievedintizrvsputtercoatedvacuumchambers
AT ruzinovv ultimatepressuresachievedintizrvsputtercoatedvacuumchambers

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