Fabrication of ATLAS pixel detector prototypes at IRST

We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discusse...

Descripción completa

Detalles Bibliográficos
Autores principales: Boscardin, M, Betta, G F D, Gregori, P, Zen, M, Zori, N
Lenguaje:eng
Publicado: 2001
Materias:
Detectors and Experimental Techniques
Acceso en línea:https://dx.doi.org/10.1016/S0168-9002(01)00353-9
http://cds.cern.ch/record/516879
_version_ 1780897674525933568
author Boscardin, M
Betta, G F D
Gregori, P
Zen, M
Zori, N
author_facet Boscardin, M
Betta, G F D
Gregori, P
Zen, M
Zori, N
author_sort Boscardin, M
collection CERN
description We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discussed. (5 refs).
id cern-516879
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2001
record_format invenio
spelling cern-5168792019-09-30T06:29:59Zdoi:10.1016/S0168-9002(01)00353-9http://cds.cern.ch/record/516879engBoscardin, MBetta, G F DGregori, PZen, MZori, NFabrication of ATLAS pixel detector prototypes at IRSTDetectors and Experimental TechniquesWe report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discussed. (5 refs).oai:cds.cern.ch:5168792001
spellingShingle Detectors and Experimental Techniques
Boscardin, M
Betta, G F D
Gregori, P
Zen, M
Zori, N
Fabrication of ATLAS pixel detector prototypes at IRST
title Fabrication of ATLAS pixel detector prototypes at IRST
title_full Fabrication of ATLAS pixel detector prototypes at IRST
title_fullStr Fabrication of ATLAS pixel detector prototypes at IRST
title_full_unstemmed Fabrication of ATLAS pixel detector prototypes at IRST
title_short Fabrication of ATLAS pixel detector prototypes at IRST
title_sort fabrication of atlas pixel detector prototypes at irst
topic Detectors and Experimental Techniques
url https://dx.doi.org/10.1016/S0168-9002(01)00353-9
http://cds.cern.ch/record/516879
work_keys_str_mv AT boscardinm fabricationofatlaspixeldetectorprototypesatirst
AT bettagfd fabricationofatlaspixeldetectorprototypesatirst
AT gregorip fabricationofatlaspixeldetectorprototypesatirst
AT zenm fabricationofatlaspixeldetectorprototypesatirst
AT zorin fabricationofatlaspixeldetectorprototypesatirst

Ejemplares similares