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Fabrication of ATLAS pixel detector prototypes at IRST
We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discusse...
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
2001
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1016/S0168-9002(01)00353-9 http://cds.cern.ch/record/516879 |