Development of Hybrid and Monolithic Silicon Micropattern Detectors

%RD-19 \\ \\ In a collaborative effort between particle physics institutes and microelectronics industry we are undertaking the development of true 2-dimensional semiconductor particle detectors with on-chip signal processing and information extraction: the so-called micropattern detector. This detector is able to cope in a robust way with high multiplicity events at high rates, while allowing for a longer detector lifetime under irradiation and a thinner sensitive depletion region. Therefore, it will be ideally suited for the complicated events in the LHC p-p collider experiments. Following a $^{\prime}$stepping stone$^{\prime}$ approach several telescopes of pixel planes, totalling now 600 cm$^{2}$ with \(>\)~1~M elements have been used in the WA97, NA50 and NA57 lead ion experiments. This new technology has facilitated the tracking considerably (see Fig.1). Not only Si but also GaAs and possibly diamond matrices can be connected to the readout matrix. Tests with GaAs pixel detectors with the RD-19 readout have been successful. The same devices have been used to detect photons coming from a scintillating fibre bundle or in X-ray images. They have been used as the anode array in a vacuum phototube or as a light detector behind an image intensifier.\\ \\