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SCALPEL: Projection Electron Beam Lithography
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
1999
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/553131 |
| _version_ | 1780898574965407744 |
|---|---|
| author | Harriott, L R |
| author_facet | Harriott, L R |
| author_sort | Harriott, L R |
| collection | CERN |
| id | cern-553131 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1999 |
| record_format | invenio |
| spelling | cern-5531312019-09-30T06:29:59Zhttp://cds.cern.ch/record/553131engHarriott, L RSCALPEL: Projection Electron Beam LithographyAccelerators and Storage Ringsoai:cds.cern.ch:5531311999 |
| spellingShingle | Accelerators and Storage Rings Harriott, L R SCALPEL: Projection Electron Beam Lithography |
| title | SCALPEL: Projection Electron Beam Lithography |
| title_full | SCALPEL: Projection Electron Beam Lithography |
| title_fullStr | SCALPEL: Projection Electron Beam Lithography |
| title_full_unstemmed | SCALPEL: Projection Electron Beam Lithography |
| title_short | SCALPEL: Projection Electron Beam Lithography |
| title_sort | scalpel: projection electron beam lithography |
| topic | Accelerators and Storage Rings |
| url | http://cds.cern.ch/record/553131 |
| work_keys_str_mv | AT harriottlr scalpelprojectionelectronbeamlithography |