Cargando…
Characteristics of Helium Ion Beams from Multicusp Source and Study of Beam Transport
Autores principales: | Sasao, M, Nishiura, M, Guharay, S K, Kuroda, T, Hamabe, M, Ramos, H J, Wada, M |
---|---|
Lenguaje: | eng |
Publicado: |
1999
|
Materias: | |
Acceso en línea: | http://cds.cern.ch/record/553457 |
Ejemplares similares
-
Beam emittance measurements on multicusp ion sources
por: Sarstedt, M, et al.
Publicado: (1995) -
Multicusp sources for ion beam lithography applications
por: Leung, K N, et al.
Publicado: (1995) -
Energy spread of ion beams generated in multicusp ion sources
por: Sarstedt, M, et al.
Publicado: (1996) -
Multicusp Ion Source for Ion Projection Lithography
por: Lee, Y, et al.
Publicado: (1999) -
Multicusp Ion Source for Induction Linac Applications
por: Reijonen, J, et al.
Publicado: (1999)