Cargando…

Multicusp Ion Source for Ion Projection Lithography

Detalles Bibliográficos
Autores principales:	Lee, Y, Leung, K N, Williams, M D, Bruenger, W H, Fallmann, W, Löschner, H, Stengl, G
Lenguaje:	eng
Publicado:	1999
Materias:	Accelerators and Storage Rings
Acceso en línea:	http://cds.cern.ch/record/553792

Ejemplares similares

Multicusp sources for ion beam lithography applications
por: Leung, K N, et al.
Publicado: (1995)

Beam emittance measurements on multicusp ion sources
por: Sarstedt, M, et al.
Publicado: (1995)

Energy spread of ion beams generated in multicusp ion sources
por: Sarstedt, M, et al.
Publicado: (1996)

Multicusp Ion Source for Induction Linac Applications
por: Reijonen, J, et al.
Publicado: (1999)

Development of ion sources for ion projection lithography
por: Lee, Y, et al.
Publicado: (1996)

Recent development on rf-driven multicusp $H^-$ ion sources
por: Leung, K N, et al.
Publicado: (1996)

Measurements on a DC volume H- multicusp ion source for TRIUMF
por: Kendall, K R, et al.
Publicado: (1986)

Characteristics of Helium Ion Beams from Multicusp Source and Study of Beam Transport
por: Sasao, M, et al.
Publicado: (1999)

Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation
por: Wengrow, A B, et al.
Publicado: (1996)

Ion Sources for Nanofabrication and High Resolution Lithography
por: Melngailis, J
Publicado: (2001)

Design of Ion Source for LANSCE Upgrade
por: Williams, M, et al.
Publicado: (1999)

The RF H$^−$ ion source project at RAL
por: Tarvainen, Olli, et al.
Publicado: (2018)

Laser ion sources
por: Kluge, H J, et al.
Publicado: (1985)

Ion sources for heavy ion fusion
por: Yu, S S, et al.
Publicado: (1996)

REXEBIS the Electron Beam Ion Source for the REX-ISOLDE project
por: Wenander, F, et al.
Publicado: (1998)

Novel laser ion sources
por: Fournier, P, et al.
Publicado: (2000)

Ion sources
por: Haseroth, H, et al.
Publicado: (1992)

Laser ion source development for heavy ions
por: Haseroth, H, et al.
Publicado: (1997)

6th International Conference on Ion Sources
por: Dutto, Gerardo, et al.
Publicado: (1996)

A microwave-driven negative ion source
por: Wills, J S C, et al.
Publicado: (1995)

High current short pulse ion sources
por: Leung, K N
Publicado: (1996)

Ion sources
por: Angert, N
Publicado: (1994)

Ion sources
por: Angert, N
Publicado: (1985)

SCALPEL: Projection Electron Beam Lithography
por: Harriott, L R
Publicado: (1999)

Laser Ion Source Development for Heavy Ions
por: Haseroth, H, et al.
Publicado: (1996)

Handbook of ion sources
por: Wolf, Bernhard H
Publicado: (1995)

Mechanical Design of the Prototype $\H^{-}$ Ion Source for the Spallation Neutron Source
por: Mukherjee, S K, et al.
Publicado: (1999)

Status of ECR ion sources at JAERI
por: Yokota, W, et al.
Publicado: (1999)

Ion source developments for stable and radioactive ion beams at GANIL
por: Leroy, R, et al.
Publicado: (1999)

The laser ion source test facility at CERN
por: Amdidouche, Y, et al.
Publicado: (1991)

Measurements with Thomson parabola ion analyser of plasma and extracted ions from CERN laser ion source
por: Kugler, H, et al.
Publicado: (1997)

Ion sources
por: Haseroth, Helmut, et al.
Publicado: (1992)

Status of the INS SF-ECR ion source
por: Ohshiro, Y, et al.
Publicado: (1995)

High-charge state ion beam production from a laser ion source
por: Bourgeois, Μ, et al.
Publicado: (1996)

Laser ion source developments
por: Kugler, H
Publicado: (1998)

Production of ion beams with the use of ECR ion sources
por: Pivarc, J, et al.
Publicado: (1997)

Laser ion source for heavy ion synchrotrons: invited paper
por: Sharkov, B Yu, et al.
Publicado: (1998)

Performance of the ECR ion source of CERN’s heavy ion injector
por: Bougarel, MP, et al.
Publicado: (1996)

Performance of the ECR ion source of CERN's heavy ion injector
por: Bougarel, M P, et al.
Publicado: (1995)

CERN PS laser ion source development
por: Fournier, P, et al.
Publicado: (1999)

Cannot write session to /tmp/vufind_sessions/sess_atgu8i93vigal4omuckgmpdgaa