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Diffusion of Gold and Platinum in Amorphous Silicon
By means of radiotracer experiments the diffusion of Au and Pt in radio-frequency-sputtered amorphous silicon (a-Si) was investigated. Specimens of a-Si with homogeneous doping concentrations of Au or Pt in the range 0$\, - \,$1,7~at.\% were produced by co-sputtering of Si and Au or Pt, respectively...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
2002
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/5732 |