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Investigation of design parameters for radiation hard silicon microstrip detectors

In the context of the development of radiation hard silicon microstrip detectors for the CMS Tracker, we have investigated the dependence of interstrip and backplane capacitance as well as depletion and breakdown voltage on the design parameters and substrate characteristics of the devices. Measurem...

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Detalles Bibliográficos
Autores principales: Braibant, S, Demaria, N, Feld, L, Frey, A, Fürtjes, A, Glessing, W D, Hammarström, R, Honma, A, Mannelli, M, Mariotti, C, Mättig, P, Migliore, E, Piperov, S, Runólfsson, O, Schmitt, B, Söldner-Rembold, S, Surrow, B
Lenguaje:eng
Publicado: 2002
Materias:
Acceso en línea:https://dx.doi.org/10.1016/S0168-9002(01)02120-9
http://cds.cern.ch/record/590836
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author Braibant, S
Demaria, N
Feld, L
Frey, A
Fürtjes, A
Glessing, W D
Hammarström, R
Honma, A
Mannelli, M
Mariotti, C
Mättig, P
Migliore, E
Piperov, S
Runólfsson, O
Schmitt, B
Söldner-Rembold, S
Surrow, B
author_facet Braibant, S
Demaria, N
Feld, L
Frey, A
Fürtjes, A
Glessing, W D
Hammarström, R
Honma, A
Mannelli, M
Mariotti, C
Mättig, P
Migliore, E
Piperov, S
Runólfsson, O
Schmitt, B
Söldner-Rembold, S
Surrow, B
author_sort Braibant, S
collection CERN
description In the context of the development of radiation hard silicon microstrip detectors for the CMS Tracker, we have investigated the dependence of interstrip and backplane capacitance as well as depletion and breakdown voltage on the design parameters and substrate characteristics of the devices. Measurements have been made for strip pitches between 60 and 240 mu m and various strip implants and metal widths, using multi-geometry devices, fabricated on wafers of either <111> or <100> crystal orientation, of resistivities between 1 and 6 k Omega cm and of thicknesses between 300 and 410 mu m. The effect of irradiation on properties of devices has been studied with 24 GeV/c protons up to a fluence of 4.3*10/sup 14/ cm /sup -2/. (15 refs).
id cern-590836
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2002
record_format invenio
spelling cern-5908362019-09-30T06:29:59Zdoi:10.1016/S0168-9002(01)02120-9http://cds.cern.ch/record/590836engBraibant, SDemaria, NFeld, LFrey, AFürtjes, AGlessing, W DHammarström, RHonma, AMannelli, MMariotti, CMättig, PMigliore, EPiperov, SRunólfsson, OSchmitt, BSöldner-Rembold, SSurrow, BInvestigation of design parameters for radiation hard silicon microstrip detectorsDetectors and Experimental TechniquesIn the context of the development of radiation hard silicon microstrip detectors for the CMS Tracker, we have investigated the dependence of interstrip and backplane capacitance as well as depletion and breakdown voltage on the design parameters and substrate characteristics of the devices. Measurements have been made for strip pitches between 60 and 240 mu m and various strip implants and metal widths, using multi-geometry devices, fabricated on wafers of either <111> or <100> crystal orientation, of resistivities between 1 and 6 k Omega cm and of thicknesses between 300 and 410 mu m. The effect of irradiation on properties of devices has been studied with 24 GeV/c protons up to a fluence of 4.3*10/sup 14/ cm /sup -2/. (15 refs).oai:cds.cern.ch:5908362002
spellingShingle Detectors and Experimental Techniques
Braibant, S
Demaria, N
Feld, L
Frey, A
Fürtjes, A
Glessing, W D
Hammarström, R
Honma, A
Mannelli, M
Mariotti, C
Mättig, P
Migliore, E
Piperov, S
Runólfsson, O
Schmitt, B
Söldner-Rembold, S
Surrow, B
Investigation of design parameters for radiation hard silicon microstrip detectors
title Investigation of design parameters for radiation hard silicon microstrip detectors
title_full Investigation of design parameters for radiation hard silicon microstrip detectors
title_fullStr Investigation of design parameters for radiation hard silicon microstrip detectors
title_full_unstemmed Investigation of design parameters for radiation hard silicon microstrip detectors
title_short Investigation of design parameters for radiation hard silicon microstrip detectors
title_sort investigation of design parameters for radiation hard silicon microstrip detectors
topic Detectors and Experimental Techniques
url https://dx.doi.org/10.1016/S0168-9002(01)02120-9
http://cds.cern.ch/record/590836
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