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Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Noyes
1998
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/612995 |
| _version_ | 1780900262749143040 |
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| author | Mattox, Donald M |
| author_facet | Mattox, Donald M |
| author_sort | Mattox, Donald M |
| collection | CERN |
| id | cern-612995 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1998 |
| publisher | Noyes |
| record_format | invenio |
| spelling | cern-6129952021-04-22T02:39:36Zhttp://cds.cern.ch/record/612995engMattox, Donald MHandbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination controlEngineeringNoyesoai:cds.cern.ch:6129951998 |
| spellingShingle | Engineering Mattox, Donald M Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control |
| title | Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control |
| title_full | Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control |
| title_short | Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control |
| title_sort | handbook of physical vapor deposition (pvd) processing: film formation, adhesion, surface preparation and contamination control |
| topic | Engineering |
| url | http://cds.cern.ch/record/612995 |
| work_keys_str_mv | AT mattoxdonaldm handbookofphysicalvapordepositionpvdprocessingfilmformationadhesionsurfacepreparationandcontaminationcontrol |