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Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control

Detalles Bibliográficos
Autor principal:	Mattox, Donald M
Lenguaje:	eng
Publicado:	Noyes 1998
Materias:	Engineering
Acceso en línea:	http://cds.cern.ch/record/612995

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