Study of the discharge gas trapping during thin film growth

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New data on the amount of sputter gas implanted in thin films are presented, complementing the results reported in the note CERN-EST-99-005-SM, published in Vacuum, Vol. 60, 1-2 (2001) Pp. 89-94. A detailed study has been performed for Ti, Zr, and V and for TiZr and TiVZr alloys.

Detalles Bibliográficos
Autores principales: Calatroni, S, Benvenuti, Cristoforo, Carver, J, Chiggiato, P, Clair, S, Neupert, H, Vollenberg, W
Lenguaje:eng
Publicado: 2003
Materias:
Accelerators and Storage Rings
Acceso en línea:http://cds.cern.ch/record/628983
_version_ 1780900591038365696
author Calatroni, S
Benvenuti, Cristoforo
Carver, J
Chiggiato, P
Clair, S
Neupert, H
Vollenberg, W
author_facet Calatroni, S
Benvenuti, Cristoforo
Carver, J
Chiggiato, P
Clair, S
Neupert, H
Vollenberg, W
author_sort Calatroni, S
collection CERN
description New data on the amount of sputter gas implanted in thin films are presented, complementing the results reported in the note CERN-EST-99-005-SM, published in Vacuum, Vol. 60, 1-2 (2001) Pp. 89-94. A detailed study has been performed for Ti, Zr, and V and for TiZr and TiVZr alloys.
id cern-628983
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2003
record_format invenio
spelling cern-6289832019-09-30T06:29:59Zhttp://cds.cern.ch/record/628983engCalatroni, SBenvenuti, CristoforoCarver, JChiggiato, PClair, SNeupert, HVollenberg, WStudy of the discharge gas trapping during thin film growthAccelerators and Storage RingsNew data on the amount of sputter gas implanted in thin films are presented, complementing the results reported in the note CERN-EST-99-005-SM, published in Vacuum, Vol. 60, 1-2 (2001) Pp. 89-94. A detailed study has been performed for Ti, Zr, and V and for TiZr and TiVZr alloys.CERN-EST-2003-001-SMoai:cds.cern.ch:6289832003-06-15
spellingShingle Accelerators and Storage Rings
Calatroni, S
Benvenuti, Cristoforo
Carver, J
Chiggiato, P
Clair, S
Neupert, H
Vollenberg, W
Study of the discharge gas trapping during thin film growth
title Study of the discharge gas trapping during thin film growth
title_full Study of the discharge gas trapping during thin film growth
title_fullStr Study of the discharge gas trapping during thin film growth
title_full_unstemmed Study of the discharge gas trapping during thin film growth
title_short Study of the discharge gas trapping during thin film growth
title_sort study of the discharge gas trapping during thin film growth
topic Accelerators and Storage Rings
url http://cds.cern.ch/record/628983
work_keys_str_mv AT calatronis studyofthedischargegastrappingduringthinfilmgrowth
AT benvenuticristoforo studyofthedischargegastrappingduringthinfilmgrowth
AT carverj studyofthedischargegastrappingduringthinfilmgrowth
AT chiggiatop studyofthedischargegastrappingduringthinfilmgrowth
AT clairs studyofthedischargegastrappingduringthinfilmgrowth
AT neuperth studyofthedischargegastrappingduringthinfilmgrowth
AT vollenbergw studyofthedischargegastrappingduringthinfilmgrowth

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