The study of metal-alloy targets and excimer laser deposition technology

Pulsed Laser Deposition (PLD) technology is described. Design and manufacture of the PLD installation is illustrated in detail. The Cu films and Cu/Fe multi-layers are produced by PLD method. The production of the Mg/Si films using magnetron sputtering method is investigated in detail. The percent o...

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Detalles Bibliográficos
Autores principales: Xu Hua, Tang Xiao Hong, Tang Yong Jian, Wu Wei Dong, Zhang Ji Cheng
Lenguaje:chi
Publicado: 2002
Materias:
Condensed Matter
Acceso en línea:http://cds.cern.ch/record/747258
Descripción
Sumario:Pulsed Laser Deposition (PLD) technology is described. Design and manufacture of the PLD installation is illustrated in detail. The Cu films and Cu/Fe multi-layers are produced by PLD method. The production of the Mg/Si films using magnetron sputtering method is investigated in detail. The percent of Si on Mg/Si film surface is measured by using conductivity method

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