The study of metal-alloy targets and excimer laser deposition technology

Pulsed Laser Deposition (PLD) technology is described. Design and manufacture of the PLD installation is illustrated in detail. The Cu films and Cu/Fe multi-layers are produced by PLD method. The production of the Mg/Si films using magnetron sputtering method is investigated in detail. The percent o...

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Detalles Bibliográficos
Autores principales: Xu Hua, Tang Xiao Hong, Tang Yong Jian, Wu Wei Dong, Zhang Ji Cheng
Lenguaje:chi
Publicado: 2002
Materias:
Condensed Matter
Acceso en línea:http://cds.cern.ch/record/747258
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author Xu Hua
Tang Xiao Hong
Tang Yong Jian
Wu Wei Dong
Zhang Ji Cheng
author_facet Xu Hua
Tang Xiao Hong
Tang Yong Jian
Wu Wei Dong
Zhang Ji Cheng
author_sort Xu Hua
collection CERN
description Pulsed Laser Deposition (PLD) technology is described. Design and manufacture of the PLD installation is illustrated in detail. The Cu films and Cu/Fe multi-layers are produced by PLD method. The production of the Mg/Si films using magnetron sputtering method is investigated in detail. The percent of Si on Mg/Si film surface is measured by using conductivity method
id cern-747258
institution Organización Europea para la Investigación Nuclear
language chi
publishDate 2002
record_format invenio
spelling cern-7472582019-09-30T06:29:59Zhttp://cds.cern.ch/record/747258chiXu HuaTang Xiao HongTang Yong JianWu Wei DongZhang Ji ChengThe study of metal-alloy targets and excimer laser deposition technologyCondensed MatterPulsed Laser Deposition (PLD) technology is described. Design and manufacture of the PLD installation is illustrated in detail. The Cu films and Cu/Fe multi-layers are produced by PLD method. The production of the Mg/Si films using magnetron sputtering method is investigated in detail. The percent of Si on Mg/Si film surface is measured by using conductivity methodCAEP-0129oai:cds.cern.ch:7472582002
spellingShingle Condensed Matter
Xu Hua
Tang Xiao Hong
Tang Yong Jian
Wu Wei Dong
Zhang Ji Cheng
The study of metal-alloy targets and excimer laser deposition technology
title The study of metal-alloy targets and excimer laser deposition technology
title_full The study of metal-alloy targets and excimer laser deposition technology
title_fullStr The study of metal-alloy targets and excimer laser deposition technology
title_full_unstemmed The study of metal-alloy targets and excimer laser deposition technology
title_short The study of metal-alloy targets and excimer laser deposition technology
title_sort study of metal-alloy targets and excimer laser deposition technology
topic Condensed Matter
url http://cds.cern.ch/record/747258
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