Cargando…
The study of metal-alloy targets and excimer laser deposition technology
Pulsed Laser Deposition (PLD) technology is described. Design and manufacture of the PLD installation is illustrated in detail. The Cu films and Cu/Fe multi-layers are produced by PLD method. The production of the Mg/Si films using magnetron sputtering method is investigated in detail. The percent o...
| Autores principales: | , , , , |
|---|---|
| Lenguaje: | chi |
| Publicado: |
2002
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/747258 |