Analysis of methods for obtaining of a uniform particle distribution on a target on its irradiation by a beam of the krypton ions extracted from the implantator IC-100

Some methods of the target uniform irradiation by heavy ions have been analyzed. As a result the scanning system for the sup 8 sup 4 Kr sup 1 sup 5 sup + ion beam extracted from the cyclotron IC-100 has been chosen and worked up. It consists of two deflecting yokes creating horizontal and vertical magnetic fields. The yokes are supplied by generators of saw-tooth current having the definitely fixed frequencies. When both generators work synchronously the centre of mass of the ion beam 'draws' a pattern on the target. The dimensions of the pattern cells are determined by the ratio of these frequencies. The correlation between the generator frequencies when heterogeneity of the particle density distribution does not exceed the required value of +- 5% is obtained. It has been shown that for the moving target the chosen scanning scheme allows one to obtain its uniform density distribution. For the slow target velocities (20-50 cm/s) this scheme also allows one to compensate the collapse in the particle density distribution on the target when the protective beam interruption occurs on time up to 0.3 s. The short description of the deflection yokes construction, their parameters, the scheme of the scanning generators and first results of their stand tests are presented.