Development of a Silicon Based Electron Beam Transmission Window for Use in a KrF Excimer Laser System

The Princeton Plasma Physics Laboratory (PPPL), in collaboration with the Naval Research Laboratory (NRL), is currently investigating various novel materials (single crystal silicon, <100>, <110> and <111>) for use as electron-beam transmission windows in a KrF excimer laser system...

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Detalles Bibliográficos
Autores principales: Gentile, C A, Fan, H M, Hartfield, J W, Hawryluk, R J, Hegeler, F, Heitzenroeder, P J, Jun, C H, Ku, L P, Lamarche, P H, Myers, M C, Parker, J J, Parsells, R F, Payen, M, Raftopoulos, S, Sethian, J D
Lenguaje:eng
Publicado: 2002
Materias:
Condensed Matter
Acceso en línea:http://cds.cern.ch/record/747733

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