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Possibilities of the electrostatic accelerators use for materials modification
A short survey of high (MeV) energy ion implantation into semiconductors, metals and insulators to modify their characteristics is given. Attention is paid to some problems concerning the treatment of basic ion-solid interaction processes. The technical features of the electrostatic accelerators use...
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| Lenguaje: | ukr |
| Publicado: |
2002
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| Acceso en línea: | http://cds.cern.ch/record/747850 |