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16th International Vacuum Microelectronics Conference
Autores principales: | , , |
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Lenguaje: | eng |
Publicado: |
2004
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/782208 |
_version_ | 1780904386218688512 |
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author | Gotoh, Yasuhiko Ishikawa, Junzo Takai, Mikio |
author_facet | Gotoh, Yasuhiko Ishikawa, Junzo Takai, Mikio |
author_sort | Gotoh, Yasuhiko |
collection | CERN |
id | cern-782208 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2004 |
record_format | invenio |
spelling | cern-7822082021-04-25T17:31:34Z http://cds.cern.ch/record/782208 eng Gotoh, Yasuhiko Ishikawa, Junzo Takai, Mikio 16th International Vacuum Microelectronics Conference Engineering 2004 |
spellingShingle | Engineering Gotoh, Yasuhiko Ishikawa, Junzo Takai, Mikio 16th International Vacuum Microelectronics Conference |
title | 16th International Vacuum Microelectronics Conference |
title_full | 16th International Vacuum Microelectronics Conference |
title_fullStr | 16th International Vacuum Microelectronics Conference |
title_full_unstemmed | 16th International Vacuum Microelectronics Conference |
title_short | 16th International Vacuum Microelectronics Conference |
title_sort | 16th international vacuum microelectronics conference |
topic | Engineering |
url | http://cds.cern.ch/record/782208 |
work_keys_str_mv | AT gotohyasuhiko 16thinternationalvacuummicroelectronicsconference AT ishikawajunzo 16thinternationalvacuummicroelectronicsconference AT takaimikio 16thinternationalvacuummicroelectronicsconference |