Control of the process for the sensors of the CMS silicon strip tracker

The inner tracking system of the Compact Muon Solenoid experiment at the Large Hadron Collider consists of the world largest Silicon Strip Tracker. A detailed quality assurance program is under way to ensure the full compliance of all delivered sensors with the technical specifications. The focus will be here on the "Process Qualification Control" to monitor the stability of the fabrication process throughout the production phase. A description of the setup in the three laboratories involved (Florence, Strasbourg, Vienna) is given and the results obtained with the first delivered batches are shown.