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International Conference on Characterization and Metrology for ULSI Technology
| Autores principales: | , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
AIP
2003
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/866068 |
| _version_ | 1780907392177799168 |
|---|---|
| author | Diebold, Alain C Khosla, Rajinder P McDonald, Robert Secula, Erik M Seiler, David G Shaffner, Thomas J N Zollner, Stefan |
| author_facet | Diebold, Alain C Khosla, Rajinder P McDonald, Robert Secula, Erik M Seiler, David G Shaffner, Thomas J N Zollner, Stefan |
| author_sort | Diebold, Alain C |
| collection | CERN |
| id | cern-866068 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2003 |
| publisher | AIP |
| record_format | invenio |
| spelling | cern-8660682021-04-25T17:28:50Zhttp://cds.cern.ch/record/866068engDiebold, Alain CKhosla, Rajinder PMcDonald, RobertSecula, Erik MSeiler, David GShaffner, Thomas J NZollner, StefanInternational Conference on Characterization and Metrology for ULSI TechnologyCondensed MatterAIPoai:cds.cern.ch:8660682003 |
| spellingShingle | Condensed Matter Diebold, Alain C Khosla, Rajinder P McDonald, Robert Secula, Erik M Seiler, David G Shaffner, Thomas J N Zollner, Stefan International Conference on Characterization and Metrology for ULSI Technology |
| title | International Conference on Characterization and Metrology for ULSI Technology |
| title_full | International Conference on Characterization and Metrology for ULSI Technology |
| title_fullStr | International Conference on Characterization and Metrology for ULSI Technology |
| title_full_unstemmed | International Conference on Characterization and Metrology for ULSI Technology |
| title_short | International Conference on Characterization and Metrology for ULSI Technology |
| title_sort | international conference on characterization and metrology for ulsi technology |
| topic | Condensed Matter |
| url | http://cds.cern.ch/record/866068 |
| work_keys_str_mv | AT dieboldalainc internationalconferenceoncharacterizationandmetrologyforulsitechnology AT khoslarajinderp internationalconferenceoncharacterizationandmetrologyforulsitechnology AT mcdonaldrobert internationalconferenceoncharacterizationandmetrologyforulsitechnology AT seculaerikm internationalconferenceoncharacterizationandmetrologyforulsitechnology AT seilerdavidg internationalconferenceoncharacterizationandmetrologyforulsitechnology AT shaffnerthomasjn internationalconferenceoncharacterizationandmetrologyforulsitechnology AT zollnerstefan internationalconferenceoncharacterizationandmetrologyforulsitechnology |