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International Conference on Characterization and Metrology for ULSI Technology

Detalles Bibliográficos
Autores principales:	Diebold, Alain C, Khosla, Rajinder P, McDonald, Robert, Secula, Erik M, Seiler, David G, Shaffner, Thomas J N, Zollner, Stefan
Lenguaje:	eng
Publicado:	AIP 2003
Materias:	Condensed Matter
Acceso en línea:	http://cds.cern.ch/record/866068

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