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Topical Conference on Deposition And Growth : Limits For Microelectronics
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
AIP
1988
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/866327 |
| _version_ | 1780907416910561280 |
|---|---|
| author | Rubloff, Gary W |
| author_facet | Rubloff, Gary W |
| author_sort | Rubloff, Gary W |
| collection | CERN |
| id | cern-866327 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1988 |
| publisher | AIP |
| record_format | invenio |
| spelling | cern-8663272021-04-25T17:27:42Zhttp://cds.cern.ch/record/866327engRubloff, Gary WTopical Conference on Deposition And Growth : Limits For MicroelectronicsXXAIPoai:cds.cern.ch:8663271988 |
| spellingShingle | XX Rubloff, Gary W Topical Conference on Deposition And Growth : Limits For Microelectronics |
| title | Topical Conference on Deposition And Growth : Limits For Microelectronics |
| title_full | Topical Conference on Deposition And Growth : Limits For Microelectronics |
| title_fullStr | Topical Conference on Deposition And Growth : Limits For Microelectronics |
| title_full_unstemmed | Topical Conference on Deposition And Growth : Limits For Microelectronics |
| title_short | Topical Conference on Deposition And Growth : Limits For Microelectronics |
| title_sort | topical conference on deposition and growth : limits for microelectronics |
| topic | XX |
| url | http://cds.cern.ch/record/866327 |
| work_keys_str_mv | AT rubloffgaryw topicalconferenceondepositionandgrowthlimitsformicroelectronics |