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Conference on Characterization And Metrology For Ulsi Technology
| Autores principales: | , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
AIP
2001
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/866571 |
| _version_ | 1780907435907612672 |
|---|---|
| author | Diebold, Alain C Seiler, David G Shaffner, Thomas J |
| author_facet | Diebold, Alain C Seiler, David G Shaffner, Thomas J |
| author_sort | Diebold, Alain C |
| collection | CERN |
| id | cern-866571 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2001 |
| publisher | AIP |
| record_format | invenio |
| spelling | cern-8665712021-04-25T17:26:51Zhttp://cds.cern.ch/record/866571engDiebold, Alain CSeiler, David GShaffner, Thomas JConference on Characterization And Metrology For Ulsi TechnologyCondensed MatterAIPoai:cds.cern.ch:8665712001 |
| spellingShingle | Condensed Matter Diebold, Alain C Seiler, David G Shaffner, Thomas J Conference on Characterization And Metrology For Ulsi Technology |
| title | Conference on Characterization And Metrology For Ulsi Technology |
| title_full | Conference on Characterization And Metrology For Ulsi Technology |
| title_fullStr | Conference on Characterization And Metrology For Ulsi Technology |
| title_full_unstemmed | Conference on Characterization And Metrology For Ulsi Technology |
| title_short | Conference on Characterization And Metrology For Ulsi Technology |
| title_sort | conference on characterization and metrology for ulsi technology |
| topic | Condensed Matter |
| url | http://cds.cern.ch/record/866571 |
| work_keys_str_mv | AT dieboldalainc conferenceoncharacterizationandmetrologyforulsitechnology AT seilerdavidg conferenceoncharacterizationandmetrologyforulsitechnology AT shaffnerthomasj conferenceoncharacterizationandmetrologyforulsitechnology |