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International Conference Characterization and metrology for ULSI technology , March 1998
| Autores principales: | , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
AIP
1998
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/866630 |
| _version_ | 1780907440581115904 |
|---|---|
| author | Seiler, D G Shaffner, T J Walters, E J |
| author_facet | Seiler, D G Shaffner, T J Walters, E J |
| author_sort | Seiler, D G |
| collection | CERN |
| id | cern-866630 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1998 |
| publisher | AIP |
| record_format | invenio |
| spelling | cern-8666302021-04-25T17:26:38Zhttp://cds.cern.ch/record/866630engSeiler, D GShaffner, T JWalters, E JInternational Conference Characterization and metrology for ULSI technology , March 1998XXAIPoai:cds.cern.ch:8666301998 |
| spellingShingle | XX Seiler, D G Shaffner, T J Walters, E J International Conference Characterization and metrology for ULSI technology , March 1998 |
| title | International Conference Characterization and metrology for ULSI technology , March 1998 |
| title_full | International Conference Characterization and metrology for ULSI technology , March 1998 |
| title_fullStr | International Conference Characterization and metrology for ULSI technology , March 1998 |
| title_full_unstemmed | International Conference Characterization and metrology for ULSI technology , March 1998 |
| title_short | International Conference Characterization and metrology for ULSI technology , March 1998 |
| title_sort | international conference characterization and metrology for ulsi technology , march 1998 |
| topic | XX |
| url | http://cds.cern.ch/record/866630 |
| work_keys_str_mv | AT seilerdg internationalconferencecharacterizationandmetrologyforulsitechnologymarch1998 AT shaffnertj internationalconferencecharacterizationandmetrologyforulsitechnologymarch1998 AT waltersej internationalconferencecharacterizationandmetrologyforulsitechnologymarch1998 |