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New deflected-beam gauge for pressures below 10/sup -12/ Torr
A new ionization gauge for measurement of total gas pressures between 10/sup -12/ torr and 10/sup -14/ torr is described. The gauge's main features are a pair of collimating slots below the grid structure, two concentric hemi-spherical deflecting electrodes and a channel electron multiplier whi...
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| Lenguaje: | eng |
| Publicado: |
1975
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| Acceso en línea: | https://dx.doi.org/10.1116/1.568464 http://cds.cern.ch/record/873168 |