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Particle detectors made of high-resistivity Czochralski silicon
We have processed pin-diodes and strip detectors on n- and p-type high-resistivity silicon wafers grown by magnetic Czochralski method. The Czochralski silicon (Cz-Si) wafers manufactured by Okmetic Oyj have nominal resistivity of 900 Omega cm and 1.9 kOmega cm for n- and p-type, respectively. The o...
Autores principales: | Härkönen, J, Eremin, V, Ivanov, A, Li, Z, Luukka, Panja, Pirojenko, A, Riihimaki, I, Tuominen, E, Tuovinen, E, Verbitskaya, E, Virtanen, A |
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Lenguaje: | eng |
Publicado: |
2005
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/j.nima.2005.01.057 http://cds.cern.ch/record/908847 |
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