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International Conference on MEMS and Semiconductor Nanotechnology
| Lenguaje: | eng |
|---|---|
| Publicado: |
2005
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/941333 |
| _version_ | 1780909788770598912 |
|---|---|
| collection | CERN |
| id | cern-941333 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2005 |
| record_format | invenio |
| spelling | cern-9413332019-09-30T06:29:59Zhttp://cds.cern.ch/record/941333engInternational Conference on MEMS and Semiconductor NanotechnologyXXoai:cds.cern.ch:9413332005 |
| spellingShingle | XX International Conference on MEMS and Semiconductor Nanotechnology |
| title | International Conference on MEMS and Semiconductor Nanotechnology |
| title_full | International Conference on MEMS and Semiconductor Nanotechnology |
| title_fullStr | International Conference on MEMS and Semiconductor Nanotechnology |
| title_full_unstemmed | International Conference on MEMS and Semiconductor Nanotechnology |
| title_short | International Conference on MEMS and Semiconductor Nanotechnology |
| title_sort | international conference on mems and semiconductor nanotechnology |
| topic | XX |
| url | http://cds.cern.ch/record/941333 |